Mechanical properties of silicon in subsurface damage layer from nano-grinding studied by atomistic simulation

Zhiwei Zhang(Liaocheng University), Huiping Yu(Beijing University of Technology), Tong An(Beijing University of Technology), Fei Qin(Zhejiang Chinese Medical University), Pei Chen(Beijing University of Technology)
AIP Advances
May 1, 2018
Cited by 17


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