Formation of TiN Films Using Minimal Sputtering Tool

Shuichi Noda, Shiro Hara(National Institute of Advanced Industrial Science and Technology), Yuki Yabuta, Ryuichiro Kamei, Kazumasa Nemoto, Naoko Yamamoto(Disco (japan)), Hirohisa Tanaka(Kwansei Gakuin University), Kazuhiro Koga, Sommawan Khumpuang

The Japan Society of Applied Physics

February 8, 2018

Cited by 0

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