Molecular dynamics simulation on subsurface damage layer during nano grinding process of silicon wafer
Zhiwei Zhang(Liaocheng University), Fei Qin(Zhejiang Chinese Medical University), Pei Chen(Beijing University of Technology)
Cited by 9
Related Papers
A Study of Personal Recognition Method Based on EMG Signal
|IEEE Transactions on Biomedical Circuits and Systems|2020|92
An investigation on high-efficiency profile grinding of directional solidified nickel-based superalloys DZ125 with electroplated CBN wheel
|The International Journal of Advanced Manufacturing Technology|2015|92
Hybrid Triboelectric‐Electromagnetic Nanogenerator with a Double‐Sided Fluff and Double Halbach Array for Wave Energy Harvesting
|Advanced Functional Materials|2022|88
Influence of the growth temperature of AlN nucleation layer on AlN template grown by high-temperature MOCVD
|Materials Letters|2013|85
The optimized growth of AlN templates for back-illuminated AlGaN-based solar-blind ultraviolet photodetectors by MOCVD
|Journal of Materials Chemistry C|2018|77