Direct Measurements of Self-Sputtering, Swelling, and Deposition Effects of N-Type Low-Energy Ion Implantations
Shu Qin(Micron (United States)), Shi-Feng Lu(Micron (United States)), Allen McTeer(Micron (United States)), Yongjun Hu(South China Normal University), Kent Zhuang(Micron (United States))
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