Separation of vacancy and interstitial depth profiles in proton- and boron-implanted silicon
P. Pellegrino(KTH Royal Institute of Technology), B. G. Svensson(KTH Royal Institute of Technology), C. Jagadish(Australian National University), J. Wong‐Leung(Australian National University), Anders Hallén(KTH Royal Institute of Technology), Patrick Lévêque(KTH Royal Institute of Technology), H. Kortegaard-Nielsen(KTH Royal Institute of Technology)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
January 1, 2002
Cited by 5
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