Terahertz micromachined on-wafer probes: Repeatability and robustness
Lihan Chen(University of Virginia), N. Scott Barker(University of Virginia), Christopher Groppil(Arizona State University), Theodore Reck(Virginia Diodes (United States)), Chunhu Zhang(University of Virginia), Robert M. Weikle(Microprobes (United States)), Alex Arsenovic(University of Virginia), Arthur W. Lichtenberger(University of Virginia)
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