Soft x-ray reflectometry, hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO<sub>2</sub>(Ti)/SiO<sub>2</sub>/Si stacks

Е. О. Филатова(St Petersburg University), F. Schäfers, Mihaela Gorgoi(Helmholtz-Zentrum Berlin für Materialien und Energie), Andréy Sokolov(St Petersburg University), S. A. Yulin(Fraunhofer Institute for Applied Optics and Precision Engineering), Е. В. Убыйвовк(St Petersburg University), I. V. Kozhevnikov(A.V. Shubnikov Institute of Crystallography)
Science and Technology of Advanced Materials
February 1, 2012
Cited by 26


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