Study of Low-Energy Doping Processes Using Continuous Anodic Oxidation Technique/Differential Hall Effect Measurements

Shu Qin(Micron (United States)), Allen McTeer(Micron (United States)), Yongjun Hu(South China Normal University), S. Prussin(University of California, Los Angeles), Jason Reyes(University of California, Los Angeles)
IEEE Transactions on Plasma Science
August 11, 2009
Cited by 13


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