Transmission electron microscopy characterization of secondary defects created by MeV Si, Ge, and Sn implantation in silicon

J. Wong‐Leung(Australian National University), D. J. H. Cockayne(Australian National University), Jin Zou(Xinjiang Institute of Engineering), Chih‐Lung Chou(Reef Ecologic), J. D. Fitz Gerald(Australian National University), S. Fatima(Australian National University), C. Jagadish(Australian National University)
Journal of Applied Physics
August 1, 2000
Cited by 10


Related Papers