Strain partition of Si/SiGe and SiO2/SiGe on compliant substrates

H. Yin(Princeton University), James C. Sturm(Princeton University), Karl D. Hobart(United States Naval Research Laboratory), S. R. Shieh(Princeton University), T. S. Duffy(Princeton University), Fritz J. Kub(United States Naval Research Laboratory)
Applied Physics Letters
May 29, 2003
Cited by 33


Related Papers