Optical evidence of precipitates in arsenic-implanted silicon

A. Borghesi(Inserm), E. Rimini(University of Catania), S. U. Campisano(University of Pavia), P. Baeri(University of Catania), G. Guizzetti(University of Pavia), A. Stella(Istituto Nazionale di Fisica Nucleare, Sezione di Pavia)
Materials Science and Engineering B
January 1, 1990
Cited by 0


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