Ultrahigh growth rate of epitaxial silicon by chemical vapor deposition at low temperature with neopentasilane

Keith Chung(Princeton University), Satheesh Kuppurao(Applied Materials (United States)), Nan Yao(Princeton University), Kavita Singh(Applied Materials (United States)), Jay B. Benziger(Princeton University), James C. Sturm(Princeton University), David R. Carlson(Photonics (United States))
Applied Physics Letters
March 17, 2008
Cited by 41


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