Integration of highly-strained SiGe materials in 14 nm and beyond nodes FinFET technology

Guilei Wang(Chinese Academy of Sciences), Henry H. Radamson(Chinese Academy of Sciences), M. Moeen(KTH Royal Institute of Technology), Huaxiang Yin(Chinese Academy of Sciences), Yiluan Guo(Chinese Academy of Sciences), Tao Chen(University of Chinese Academy of Sciences), Junfeng Li(Institute of Microelectronics), Jun Luo(Chinese Academy of Sciences), Chao Zhao(Chinese Academy of Sciences), Ahmad Abedin(KTH Royal Institute of Technology), Huilong Zhu(University of Chinese Academy of Sciences), Mohammadreza Kolahdouz(University of Tehran)
Solid-State Electronics
August 23, 2014
Cited by 47


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