Ion beam assisted crystallization of amorphous silicon layers using high current density Gallium beams

Jonathan England, R. Gwilliam(University of Surrey), Alexandre Laquerre(Fibics (Canada)), Andrew J. Smith(Intel (United States)), Michael W. Phaneuf(Fibics (Canada))
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
February 2, 2011
Cited by 6


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