Sub-nanometer EOT scaling on In<inf>0.53</inf>Ga<inf>0.47</inf>As with atomic layer deposited HfO<inf>2</inf> as gate dielectric

Kuen Yong Lee(Hanyang University), J. Kwo(National Tsing Hua University), Y.J. Lee(National Tsing Hua University), Pei-Ching Chang(National Yang Ming Chiao Tung University), Yen‐Chung Chang(National Tsing Hua University), M. L. Huang(National Tsing Hua University), M. Hong
Proceedings of the International Power Modulator Symposium and High Voltage Workshop/Proceedings of the ... International Power Modulator Symposium and ... High Voltage Workshop
April 1, 2008
Cited by 0


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