Enhancement of phosphorus activation in vacancy engineered thin silicon-on-insulator substrates

Andrew J. Smith(Intel (United States)), S. H. Yeong(University of Surrey), Andrew P. Knights, A. Kallis(University of Bath), R. Gwilliam(University of Surrey), Vlad Stolojan(University of Surrey), P. G. Coleman(Committee on Climate Change)
Journal of Applied Physics
November 15, 2009
Cited by 5


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