ECR-plasma assisted laser ablation of as-deposited superconducting thin films for application in microelectronics

Gustaaf Borghs(KU Leuven), Robert Mertens(Humboldt-Universität zu Berlin), Piet Van Mieghem(Delft University of Technology), W. van der Vorst(IMEC), Bert Brijs(IMEC)
Journal of the Less Common Metals
October 1, 1990
Cited by 4


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