ECR-plasma assisted laser ablation of as-deposited superconducting thin films for application in microelectronics
Gustaaf Borghs(KU Leuven), Robert Mertens(Humboldt-Universität zu Berlin), Piet Van Mieghem(Delft University of Technology), W. van der Vorst(IMEC), Bert Brijs(IMEC)
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