Investigation of plasma hydrogenation and trapping mechanism for layer transfer

Peng Chen(Southwest University), S. S. Lau(University of California San Diego), M. Nastasi(Los Alamos National Laboratory), Dan Buca(Forschungszentrum Jülich), J. K. Lee(Los Alamos National Laboratory), Matty Caymax(IMEC), N. David Theodore(Motorola (United States)), T. L. Alford(Arizona State University), T. Höchbauer(Los Alamos National Laboratory), Bernd Schmidt(University of Augsburg), Paul K. Chu(City University of Hong Kong), Ming Cai(University of California San Diego), Roger Loo(IMEC), J. W. Mayer(Arizona State University), S. Mantl(Forschungszentrum Jülich)
Applied Physics Letters
January 7, 2005
Cited by 27


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