Investigation of plasma hydrogenation and trapping mechanism for layer transferPeng Chen, S. S. Lau, M. Nastasi et al.|Applied Physics Letters|2005Cited by 27
Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gapYiming Zhang, Jing Chen, Yunda Wang et al.|Microelectronic Engineering|2012Cited by 2