Co silicide formation on SiGeC/Si and SiGe/Si layers

R. A. Donaton(IMEC), James C. Sturm(Princeton University), A. St. Amour(Princeton University), G. Langouche(KU Leuven), Y. Morciaux, A. Vantomme(KU Leuven), Karen Maex(IMEC)
Applied Physics Letters
March 10, 1997
10.1063/1.118548
Cited by 61

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