Solubility limit and precipitate formation in Al-doped 4H-SiC epitaxial material

M. K. Linnarsson(KTH Royal Institute of Technology), Eva Olsson(Uppsala University), Stefan Karlsson(Kista Photonics Research Center), Martin S. Janson(KTH Royal Institute of Technology), U. Zimmermann(Uppsala University), Adolf Schöner(Kista Photonics Research Center), H. Bleichner(Kista Photonics Research Center), Lars Hultman(Linköping University), Per O. Å. Persson(Linköping University), B. G. Svensson(KTH Royal Institute of Technology), J. Wong‐Leung(Australian National University)
Applied Physics Letters
September 24, 2001
Cited by 47


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