Maximizing uniaxial tensile strain in large-area silicon-on-insulator islands on compliant substrates

Rebecca L. Peterson(Princeton University), James C. Sturm(Princeton University), Karl D. Hobart(United States Naval Research Laboratory), H. Yin(Princeton University), Fritz J. Kub(United States Naval Research Laboratory)
Journal of Applied Physics
July 15, 2006
Cited by 12


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