Ion implantation in 4H–SiC

J. Wong‐Leung(Australian National University), D. J. H. Cockayne(Australian National University), Martin S. Janson(KTH Royal Institute of Technology), M. K. Linnarsson(KTH Royal Institute of Technology), Anders Hallén(KTH Royal Institute of Technology), B. G. Svensson(KTH Royal Institute of Technology), C. Jagadish(Australian National University), Andrej Kuznetsov(University of Oslo)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
December 28, 2007
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