Fluorine-vacancy complexes in ultrashallow B-implanted Si

D. A. Abdulmalik(University of Bath), F. Cristiano(Centre National de la Recherche Scientifique), Andrew J. Smith(Intel (United States)), B.J. Sealy(University of Surrey), P. G. Coleman(Committee on Climate Change), W. Lerch(Daimler (Germany)), N. E. B. Cowern(University of Surrey), S. Paul(Daimler (Germany))
Applied Physics Letters
July 31, 2006
Cited by 21


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