Multiwavelength distributed Bragg reflector laser array fabricated using near field holographic printing with an electron-beam generated phase grating mask
D. M. Tennant(University of Tennessee at Knoxville), B. Tell(AT&T (United States)), U. Koren(AT&T (United States)), T. L. Koch(AT&T (United States)), B. I. Miller(AT&T (United States)), M.A. Newkirk(AT&T (United States)), J-M. Verdiell(AT&T (United States)), M. G. Young(AT&T (United States)), K. Feder(AT&T (United States)), R. P. Gnall(AT&T (United States))
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
November 1, 1993
Cited by 17