Optical study of high dose implanted, laser annealed silicon

A. Borghesi(Inserm), E. Rimini(University of Catania), S. U. Campisano(University of Pavia), G. Guizzetti(University of Pavia), L. Nosenzo(University of Pavia), A. Stella(Istituto Nazionale di Fisica Nucleare, Sezione di Pavia)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
January 1, 1987
Cited by 2


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