Texture, Twinning, and Metastable “Tetragonal” Phase in Ultrathin Films of HfO[sub 2] on a Si Substrate

Ian MacLaren(University of Glasgow), Stefan De Gendt(Imec the Netherlands), David W. McComb(The Ohio State University), Mhairi Mackenzie(Urban Big Data Centre), T. Ras(University of Glasgow), A. J. Craven(University of Glasgow)
Journal of The Electrochemical Society
January 1, 2009
Cited by 26


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