Advances in near field holographic grating mask technology

D. M. Tennant(University of Tennessee at Knoxville), Matthew Young(AT&T (United States)), Thomas Koch(AT&T (United States)), K.F. Dreyer(AT&T (United States)), C. B. Vartuli(AT&T (United States)), B.I. Miller(AT&T (United States)), R. P. Gnall(AT&T (United States)), K. Feder(AT&T (United States)), U. Koren(AT&T (United States))

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

November 1, 1994

10.1116/1.587641

Cited by 18

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