The role of Fe on the crystallisation of α-Si3N4 from amorphous Si–N formed by ion implantation
Z.L Li(Australian National University), J. S. Williams(University of Illinois Urbana-Champaign), J. Wong‐Leung(Australian National University), M. Conway(Australian National University), D.J. Chivers(Ricardo AEA (United Kingdom)), Prakash N. K. Deenapanray(Australian National University), J. D. Fitz Gerald(Australian National University)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
January 1, 1999
Cited by 6
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