Micromachined probes for on-wafer characterization of terahertz and submillimeter-wave components
Robert M. Weikle(Microprobes (United States)), Matthew F. Bauwens(University of Virginia), Arthur W. Lichtenberger(University of Virginia), L. Chen(University of Virginia), Theodore Reck(Virginia Diodes (United States)), Alexander Arsenovic(University of Virginia), C. Zhang(University of Virginia), N. Scott Barker(University of Virginia)
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