The Effect of Amorphization Conditions on the Measured Activation of Source Drain Extension Implants
Jonathan England, Yevgeniy V. Kondratenko, A. Renau(University of Surrey), Alexander Kontos(University of Surrey), Andrew J. Smith(Intel (United States)), R. Gwilliam(University of Surrey), Amitabh Jain, Edmund G. Seebauer(University of Illinois Urbana-Champaign), Susan B. Felch, Andrew P. Knights
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