Development of Si Neural Probe with Microfluidic Channel Fabricated Using Wafer Direct BondingSoichiro Kanno, Mitsumasa Koyanagi, Takafumi Fukushima et al.|Japanese Journal of Applied Physics|2009Cited by 9
Study of Insertion Characteristics of Si Neural Probe with Sharpened Tip for Minimally Invasive Insertion to BrainSanghoon Lee, Tetsu Tanaka, Hisashi Kino et al.|Japanese Journal of Applied Physics|2013Cited by 7