Development of Si Neural Probe with Microfluidic Channel Fabricated Using Wafer Direct Bonding

Soichiro Kanno(Tohoku University), Mitsumasa Koyanagi(Tohoku University), Kazuhiro Sakamoto(Tohoku University), Bea Jicheol(Tohoku University), Hajime Mushiake(Tohoku University), Sanghoon Lee(Korea Astronomy and Space Science Institute), N. Katayama(Tohoku University), Tetsu Tanaka(Tohoku University), Risato Kobayashi(Tohoku University), Takafumi Fukushima(Tohoku University)
Japanese Journal of Applied Physics
April 1, 2009
Cited by 9


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