Data for EMSL Project 49321 from March 2020Chongmin Wang, Junhua Song, Yang He et al.|OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)|2020Cited by 0
Optimization of the refractive index of silicon nitride films in magnetron sputtering and annealing control for low-roughnessJinxuan Hu, Zhisong Xiao, Rongjian Wu et al.|Optical Materials|2025Cited by 0