Optimization of the refractive index of silicon nitride films in magnetron sputtering and annealing control for low-roughness

Jinxuan Hu(Wuhan Polytechnic University), Zhisong Xiao(Beijing Academy of Quantum Information Sciences), Haifeng Feng(Beihang University), Wenxiu Li(Beijing Information Science & Technology University), Anping Huang(Beihang University), Rongjian Wu(Beihang University), Hao Zhang(Xuzhou Medical College), Zongqi Yang(Center for Food Safety and Applied Nutrition), Yang He(Environmental Molecular Sciences Laboratory), Jiangshun Huang(Beihang University)
Optical Materials
December 3, 2025
Cited by 0


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