Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gap

Yiming Zhang(Peking University), Jing Chen(Shanghai Jiao Tong University), Yunda Wang, Yilong Hao(Peking University), Ming Cai(University of California San Diego), Ying Wang(Chinese Academy of Sciences)
Microelectronic Engineering
March 23, 2012
Cited by 2


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