Wafer level Tungsten-Glass bonding with photosensitive BCBYi Shan, Yufeng Jin, Jia Hu et al.|Unknown|2012Cited by 2
Field-assisted titanium-glass bondingTianyu Li, Jing Chen, Yiming Zhang et al.|Unknown|2014Cited by 1
Chemical-mechanical polishing of bulk tungsten substrateJin Luo, Jing Chen, Yilong Hao et al.|Unknown|2013Cited by 0