Fabrication of 45° mirrors together with well-defined v-grooves using wet anisotropic etching of siliconCarola Strandman, Ylva Bäcklund, Lars Rosengren et al.|Journal of Microelectromechanical Systems|1995Cited by 89
New shapes in (100) Si using KOH and EDP etchesYlva Bäcklund, Lars Rosengren|Journal of Micromechanics and Microengineering|1992Cited by 59
Passive silicon transensor intended for biomedical, remote pressure monitoringYlva Bäcklund, Björn Svedbergh, Lars Rosengren et al.|Sensors and Actuators A Physical|1990Cited by 53
A system for wireless intra-ocular pressure measurements using a silicon micromachined sensorLars Rosengren, Björn Svedbergh, Terje Sjöström et al.|Journal of Micromechanics and Microengineering|1992Cited by 47
The IOP‐IOLBjörn Svedbergh, Lars Rosengren, Ylva Bäcklund et al.|Acta Ophthalmologica|1992Cited by 38