Fabrication of 45° mirrors together with well-defined v-grooves using wet anisotropic etching of silicon

Carola Strandman(Uppsala University), Ylva Bäcklund(Uppsala University), Lars Rosengren(Sahlgrenska University Hospital), H. Elderstig(Kista Photonics Research Center)
Journal of Microelectromechanical Systems
January 1, 1995
Cited by 89


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