Diffraction-limited soft-x-ray projection imaging using a laser plasma sourceDaniel A. Tichenor, L. A. Brown, W Mansfield et al.|Optics Letters|1991Cited by 44
Defect repair for soft x-ray projection lithography masksD. M. Tennant, O. R. Wood, Linus A. Fetter et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1992Cited by 11