High-κ dielectric van der Waals integration on 2D semiconductors for three-dimensional complementary logic systems
Taeho Kang(Sungkyunkwan University), Sungjoo Lee(Tohoku University), Yong‐Hoon Kim(Korea Advanced Institute of Science and Technology), Seung Yong Lee(Sungkyunkwan University), Jongwook Jeon(Konkuk University), Joonho Park(Korea Advanced Institute of Science and Technology), Hanggyo Jung(The University of Texas at Dallas)
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