Pop-down FBAR Structure for Thermal Stability without Sacrificing Coupling
Zijun Ren(Hong Kong University of Science and Technology), Yansong Yang(Hong Kong University of Science and Technology), Xiaoya Duan(Hong Kong University of Science and Technology), Jiashuai Xu(Hong Kong University of Science and Technology), Fangsheng Qian(Hong Kong University of Science and Technology), Junyan Zheng(Hong Kong University of Science and Technology), Kai Yang(University of Science and Technology of China), Xingyu Liu(Hong Kong University of Science and Technology), Haiding Sun(University of Science and Technology of China), Chengjie Zuo(Institute of Microelectronics)
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