SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications

Kai Yang(University of Science and Technology of China), Chengjie Zuo(Institute of Microelectronics), Yansong Yang(Hong Kong University of Science and Technology), Haiding Sun(University of Science and Technology of China), Junyan Zheng(Hong Kong University of Science and Technology), Jie Chen, Juan Wang(Wuhan University), Meijuan Li(Wuhan University of Technology), Zijun Ren(Xi'an Jiaotong University), Fangsheng Qian(Hong Kong University of Science and Technology), Jiming Fang(University of Science and Technology of China), Fuhong Lin(University of Science and Technology of China)
Microsystems & Nanoengineering
May 8, 2025
Cited by 21


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