Machine-learning-enabled on-the-fly analysis of RHEED patterns during thin film deposition by molecular beam epitaxy

Tiffany C. Kaspar(Pacific Northwest National Laboratory), R. Comès(Université Paris-Sud), Sarah Akers(Pacific Northwest National Laboratory), Patrick T. Gemperline(Argonne National Laboratory), Derek Hopkins(Pacific Northwest National Laboratory), Jenna A. Bilbrey(Pacific Northwest National Laboratory), Henry W. Sprueill(Pacific Northwest National Laboratory), Arman Ter-Petrosyan(Pacific Northwest National Laboratory), J. Christudasjustus(Pacific Northwest National Laboratory)

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

March 27, 2025

10.1116/6.0004493

Cited by 15

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