A 2D MEMS Crosstalk-Free Electromagnetic Micromirror for LiDAR Application

Xiao-Yong Fang(Hunan Institute of Technology), Wenming Zhang(Ministry of Education), Er-Qi Tu(Shanghai Jiao Tong University), Junfeng Zhou(Shanghai Jiao Tong University), Ang Li(Shanghai Jiao Tong University)
Journal of Microelectromechanical Systems
June 27, 2024
Cited by 16


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