Electrostatic pull-in instability in MEMS/NEMS: A review

Wenming Zhang(Ministry of Education), Guang Meng(Shanghai Jiao Tong University), Han Yan(Shanghai Jiao Tong University), Zhike Peng(Shanghai Jiao Tong University)
Sensors and Actuators A Physical
May 9, 2014
Cited by 580


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