A Picometre-Level Resolution Test Method without Nonlinearity for Heterodyne Interferometer Measurement Electronics
Yunke Sun(Harbin Institute of Technology), Jiubin Tan(Harbin Institute of Technology), Pengcheng Hu(Harbin Institute of Technology), Jianing Wang(Hong Kong Baptist University), Xing Xu(Tongji University), Wenjun Li(Harbin Institute of Technology)
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