Displacement measuring grating interferometer: a review

Pengcheng Hu(Harbin Institute of Technology), Haijin Fu(Harbin Institute of Technology), Di Chang(Harbin Institute of Technology), Ruitao Yang(Yulin Normal University), Jiubin Tan(Harbin Institute of Technology), Hongxing Yang(Harbin Institute of Technology)
Frontiers of Information Technology & Electronic Engineering
May 1, 2019
Cited by 162


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