Displacement measuring grating interferometer: a review
Pengcheng Hu(Harbin Institute of Technology), Haijin Fu(Harbin Institute of Technology), Di Chang(Harbin Institute of Technology), Ruitao Yang(Yulin Normal University), Jiubin Tan(Harbin Institute of Technology), Hongxing Yang(Harbin Institute of Technology)
Cited by 162
Related Papers
Large-range displacement measurement in narrow space scenarios: fiber microprobe sensor with subnanometer accuracy
|Photonics Research|2024|72
Experimental Array for Generating Dual Circularly-Polarized Dual-Mode OAM Radio Beams
|Scientific Reports|2017|66
High-speed PGC demodulation model and method with subnanometer displacement resolution in a fiber-optic micro-probe laser interferometer
|Photonics Research|2024|63
The first determination of the Planck constant with the joule balance NIM-2
|Metrologia|2017|55
An Annular Planar-capacitive Tilt Sensor with a 360° Measurement Range
|IEEE Transactions on Industrial Electronics|2015|53