High-speed and high-precision measurement of biaxial in-plane displacements: tens of nanometers principle error suppression in microprobe sensors

Yisi Dong(Harbin Institute of Technology), Pengcheng Hu(Harbin Institute of Technology), Ruitao Yang(Yulin Normal University), Wenrui Luo(State Key Laboratory of Pollution Control and Resource Reuse), Jinran Zhang, Wenwen Li(Kunming University of Science and Technology), Chen Zhang(University of Maryland, College Park), Hongxing Yang(Harbin Institute of Technology), Haijin Fu(Harbin Institute of Technology)
Optics Express
March 21, 2024
Cited by 3


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