Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation
Jingqian Xi(Huazhong University of Science and Technology), Pui‐In Mak(University of Macau), Michaël Kraft(KU Leuven), Yuan Wang(Huazhong University of Science and Technology), Chen Wang(Zhejiang A & F University), Pan Zhang(Peking University), Huafeng Liu(East China Normal University), Zhuoyue Zheng(University of Macau), Rui P. Martins(University of Macau), Chun Zhao(University of York)
Cited by 5
Related Papers
A vibrating beam MEMS accelerometer for gravity and seismic measurements
|Scientific Reports|2020|310
A review on coupled MEMS resonators for sensing applications utilizing mode localization
|Sensors and Actuators A Physical|2016|262
Raman scattering study of molecules adsorbed on ZnS nanocrystals
|Journal of Raman Spectroscopy|2006|220
An Ultrafast WSe<sub>2</sub> Photodiode Based on a Lateral <i>p-i-n</i> Homojunction
|ACS Nano|2021|160
Results of the Imager for Mars Pathfinder windsock experiment
|Journal of Geophysical Research Atmospheres|2000|117